Deposition of Nb2O5 Film on Large Wafer by Flashing Spray CVD Method
نویسندگان
چکیده
منابع مشابه
effect of sub-grid scales on large eddy simulation of particle deposition in a turbulent channel flow
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 2007
ISSN: 1882-0743,1348-6535
DOI: 10.2109/jcersj2.115.498